Pdf brochure piezo stack actuator specs, drawings, part numbers. These actuator stacks are available in a wide range of configurations to provide a line of powerful standard solutions dedicated to applications such as nanopositioning, precision. Dynamic analytical solution of a piezoelectric stack utilized. Only amplifiers with a matched voltage range should be considered. This is a type of piezo stack with more than one layer. Scott jordan and stefan vorndran thursday, february 1, 2018. Pd ceramic develops and offers good quality piezoelectric actuators as well as piezo components to be used in medical technology, actuator technology, automotive engineering, consumer applications and precision motion technology. Theory and applications of piezo actuators and pzt. Low voltage cofired multilayer stacks, rings and chips for. For identical electrical driving conditions, the power consumption and energy dissipation is the same. A, ctuator has been developed to describe actuator behavior for purposes of control system analysis. The behavior a piezo stack can be summarized with the following properties. By combining many chips, a stack is able to achieve a free stroke displacement that is significantly larger than that of its single chip counterpart while mainta.
Pdf piezoelectric actuators are popularly applied as actuators in high precision systems due to their small displacement resolution, fast. Low voltage actuators in casings with front mount threading 12. This is a perfect solution for difficult environments such as humid workplaces with rel. The ring actuator shows a larger surface inner and outer circumference for a better heat transfer to air. This technique has been proven in the field for many years by our extensive experience. These preloaded, packaged piezo linear actuators are based on pis proprietary picma multilayer stacks. Piezoelectric stack actuator parameter extraction with. Pica piezoelectric stack actuators physik instrumente. A piezo stack has multiple layers of piezo elements while a multilayer piezo stack has multiple layers of piezo stacks. The active element in dsms flextensional piezoelectric actuator fpa architecture is the pzt stack in the center of the frame. Piezoelectric stack or multilayer actuators are manufactured by stacking up piezoelectric disks or plates, the axis of the stack being the axis of linear motion that occurs when a voltage is applied.
A stack type actuator or piezo actuator from piezosystem jena is based on multilayer ceramics. Recentlyintroduced integrated piezoelectric flexure actuators provide. Piezo actuators, piezoelectric stack actuators piezodata. Pd ceramic would work closely with you to offer the unique piezo actuator and. Theory and applications of piezo actuators and pzt nanopositioning systems design of pzt stack actuator design of simple lever amplifier data showing impact of active trajectory control on guiding precision. P056 pica stack piezo actuators high forces, high displacement, flexible production. Designing an actuator that utilizes a piezo stack as actuation principles is not trivial.
The piezoelectric actuator drive pad is a type of rotary motor that transforms the linear motion of piezoelectric stack actuators into a precise rotational motion. Basic introduction to nanopositioning with piezoelectric. Encapsulated picma stack multilayer piezo actuators with inert gas filling. Piezoelectric actuator an overview sciencedirect topics. The above selection process results in a piezoactuator of distinct voltage range and electrical capacitance. Pica piezoelectric stack actuators piezo ceramic technology. But also tubes, benders, shear actuators and flexible transducers, are. They act mainly like an expanding element generating a compressive force. Electrode and ceramics raw materials are formed to a block and sintered at high temperatures. Do not confuse a piezo stack with a multilayer piezo stack. The preload or prestress is obtained from an external spring frame made of stainless steel which protects the mla against tensile force and provides mechanical interfaces. Piezo stack, piezoelectric stack actuators manufacturer. Low voltage cofired multilayer stacks, rings and chips. The preload or prestress is obtained from an external spring frame made of stainless steel which protects the mla against tensile force and provides mechanical interfaces for the user allowing an easier integration.
The cofired stack shown in figure7 is a practical way to assemble and wire a large number of piezo layers into one monolithic structure. Another method of amplifying the piezo stroke is to use a lever arm, which can be a primary or a secondary amplification mechanism, and can be used to generate displacements with 10 to 40 times magnification. In the cma production process the whole actuator stack structure including internal electrodes and piezo ceramics material is produced in one step. Pica power piezo actuators are made of a piezo material that allows for a higher operating temperature and thus higher dynamics. Metal sealed type are hermetically encasing the piezo stack. Piezo actuator components have to be operated in a dry, non. Piezo motor, precision piezomotor, stickslip motor. Overview piezoelectric amplifiers offer precision control for all newport piezo stack and actuator products. Version date 20141210 version date 20141210 document language add to list.
Stack actuators can generate linear movement reaching displacements of 250 micrometers and forces up to 10 kn with very high speed. The main prerequisite for selecting suitable piezo components is the precise definition of the needed operation profile by the user. Piezoelectric devices applications of piezoelectric actuator. Example a massive stack actuator pst 1507x720 shows a similar piezoceramic volume like the ringactuator hpst 150141012. The voltage applied to the piezo stack is distributed to each of the plates within the stack in a parallel configuration. Piezo actuator stack general specifications cofired monolithic piezoelectric stacks are high quality products. The benchmark solution for piezoelectric actuators is the cofired multilayer actuator cma technology. Piezo actuator stacked offered by doon ceratronics private limited, a leading supplier of piezoelectric actuators in upsidc industrial area, dehradun, uttarakhand. The multilayer actuator was incorporated in the mass. Picma piezo stacks are extremely reliable and survived 100 billion cycles of lifetesting and harsh environments in space and on the mars rover with no failures. Piezo nanopositioning motors are based on different drive principles. Multilayer piezo actuators high active passivated stack technology, 5. This type of piezo device, several versions of which are commercially available, offers extended travel from millimeters to meters with moderate resolution, and is the most practical implementation of the piezo effect for travels beyond the range of stack actuators. Electrical and force characteristics of piezoelectric.
Stack actuators should not be exposed to significant tensile loads, unequally distributed loads, offaxis loads, bending moments, or torque. The pa series actuators are based on stack type actuators made by using multilayer technology. For high force and long travel, piezowalk type motors are recommended. A stack actuator is comprised of a stack of multiple slabs of smaller pieces of piezoelectric material. Stack motion on the order of microns to tens of microns, and force from hundreds to thousands of newtons is typical.
P882 p888 picma stack multilayer piezo actuators, p080 picma stack multilayer ring actuators with inner hole, p088 picma stack multilayer piezo actuators, round cross section. Piezo actuator stacked doon ceratronics private limited. Patented picma stack multilayer piezo actuators with high reliability. This stack actuator can vibrate at frequencies up to 200hz, continuously, for 120 hours. The purpose of an actuator is to convert electrical energy into mechanical energy.
The tiny motions of each layer contribute to the overall displacement. The sa actuators are matched to the range of piezodrive amplifiers and driver modules. For this purpose, multilayer piezoelectric stacks are being considered as actuators for driving these precision mechanisms. Pica piezoelectric linear actuators in stacked design are very reliable and feature a large specific displacement. This energy conversion can be seen in speakers or motors. It is thus possible that local phase transformation could have occurred in the component crystals. Use piezo actuator components only within specified voltage and current ranges. The use of the piezoelectric actuator for driving the. Dont change formatting when entering or pasting text in the table and dont add any cell or line in and to it. Pdf energy harvesting of piezoelectric stack actuator from. Piezoelectric actuators are used for their precise control and efficiency in a wide variety of applications, with precision down to the micrometer. The piezo stack actuators have been exploited in a number of useful applications including nanopositioning, dynamic scanning system, metrology, aerospace technology and so on.
The ratio ll change in length to length for an applied voltage is quite small for a single piezoceramic element, and so most actuators are composed of a large number of thin plates, referred to as a piezo stack. Piezo actuator components have to be operated in a dry, nonreducing atmosphere which must not contain any additional chemical vapours or substances. Use piezo actuator components only within the specified operating temperature range. A hybrid actuator consisting of a dc motor plus lead screw in series with a piezoelectric stack. Download the newest pdf files or request printed catalogs and brochures by mail. Because they are connected mechanically in series, the total movement of a stacked piezo actuator is the product of a single elements movement, times the number of elements in the stack. Piezo stack actuator steminc piezoceramic discs, plates. The piezoelectric actuators developed by cedrat technologies have the following outstanding characteristics. These motors make use of continuous clampunclamp and expandcontract cycles of a number of piezo elements. Flexure actuator nanometer precision piezo actuator piezo motor precision actuator nanopositioning piezoelectric actuator.
The piezo electric coefficient, d 33, relates to the materials efficiency in transferring electrical energy to mechanical energy. The pa series stack type actuators are internally preloaded by a mechanical spring, making them ideal for dynamic applications. There are also options for openloop or closedloop operation. Piezo stack actuator, stack piezo actuator manufacturer. Thorlabs discrete piezoelectric stacks consist of multiple piezoelectric chips stacked facetoface and bonded via epoxy and glass beads. Preloading a piezo stack inside a case by means of special springs allows the actuator to handle higher tensile forces. Stack actuators can generate linear movement reaching displacements of 250 micrometers and forces up to 10. The sr rings stacks are perfectly matched to the range of piezodrive amplifiers and driver modules. Piezo stacks specs piezotechnics piezo stack actuators.
Ceramic multiaxis shear stacks nac2400 2900 noliac piezo actuators. P016, p025, p035, p045, p050, p056 pica stackpowerthru customized products. Other options for these actuators can be casings specially designed to manage the heat generated during operation, or include the possibility of position sensing for the piezoelectric stack actuator. The piezodrive sa stack actuators are highperformance piezoelectric stack actuators with a uv cured epoxy coating for improved mechanical and humidity protection. Although the stack design has made the piezo actuator practical, the displacement of the piezo stack is still very limited for some applications 14. Example a massive stack actuator pst 1507x720 shows a similar piezo ceramic volume like the ring actuator hpst 150141012. Piezoelectric actuators developed by cedrat technologies.
Piezo flexure actuators and other piezo mechanisms for precision motion control applications. The parallel prestressed actuator is a preloaded stack of low voltage piezoelectric ceramics mla. Piezo stack actuators are equipped with a highly reliable, multilayer, lowvoltage, piezoelectric transducer stack. The p212 and p216 series are highresolution linear piezo actuators translators for static and dynamic applications. Piezoelectric chips and stacks our selection of piezo chips and stacks includes cofired chips, cofired stacks, and discrete stacks. Noliac multilayer piezo plate actuator stacks can be stacked to fit the needed height or stroke. The energy harvesting performance of a piezoelectric stack actuator under a shock event is theoretically and experimentally investigated. Micromechatronic is offering the noliac multiaxis shear actuator stacks. Using the multilayer piezo stack usually comes with its benefits which. Piezo actuator manufacturer and supplier piezo direct. Pd ceramic develops and offers good quality piezoelectric actuators as well as piezo components to be used in medical technology, actuator technology, automotive engineering. They provide submillisecond response and subnanometer resolution.
The travel range can also be reduced by restraining the end plates, e. Piezo actuator movements will be on the order of a hundred micro meters supporting a load of 7 kncm2. To reduce mounting errors, a ceramic or stainless steel ball end can be used to interface the stack actuator to the load. The ringactuator shows a larger surface inner and outer circumference for a better heat transfer to air. The first method is derived from the single degree of. The bouc wen model is introduced and analyzed to express the. Modeling piezoelectric stack actuators for control of. The microdisplacement actuators that take advantage of counter. Chips and discrete stacks with throughholes, shear chips, stacks with attached strain gauges, and bimorph bending actuators are available, as well as piezo ring chips and ring stacks. The lever arm amplification method were used as amplified piezoelectric actuator in 1980s as a piezoelectric impact printer element by t. To aid in this this sheet elaborates on the parameters that are of interest for such a design. Pica thru feature an inner hole, for applying a pretension or as clear aperture in optical applications.
These actuator stacks are available in a wide range of configurations to provide a line of powerful standard solutions dedicated to applications such as nanopositioning, precision mechanics, active vibration cancellation. The purpose of showing examples of different types of applications is to provide inspiration to the wide range of applications that can benefit from the use of piezo. However, the displacement output of a singlewafer piezoelectric actuator is relatively small, so that piezo electric stack actuators psas, which are realized by. Pdf multilayer piezoelectric stack actuator characterization. High voltage piezo actuators are con structed from 0. Piezo stack actuator,precision piezo actuator, pzt stack actuator, piezo motion, piezo actuation,pzt actuation, piezo mechanics, piezo nanopositioning, piezo ceramic, piezo transducer, shear actuator, piezo bender. Pi provides many different types of piezo actuators and motors. Depending on the size of the ceramic stacks, these stack type actuators can move masses in the kns. Parallel prestressed actuators cedrat technologies. As the applied voltage on the piezo stack is increased, the pzt stack expands see dsm app note an introduction to piezoactuation. Piezoelectric amplifiers have low noise voltage output ranging from.
Any supplier of piezomechanical components will highly appreciate precise specifications of the requested components beyond the system shall do as much as possible. Modeling and control of piezoelectric stack actuators with hysteresis. Model and design of a power driver for piezoelectric stack actuators. Version for operation in environments where exposure to splash water, high humidity or oil occurs. The mechanical work capability stroke x force is therefore proportional to the active ceramic volume l x a. Piezo flexure actuators and other piezo mechanisms for. Our selection of piezo chips and stacks includes cofired chips, cofired stacks, and discrete stacks. This thesis studies a dynamic model of a moving stage driven by piezoelectric stack actuator. Piezo stack actuator is a linear motor based on electrically controllable deformation of a solid body. The piezo stack is protected in a stainless steel package. What are stacked piezo actuators and what do they do.
Stack piezo actuators are used as linear electromechanical drivers or motors. Actuator configuration can vary greatly, depending on application. Second, since strain hysteresis persists even at lower applied voltages, the complex structure of the single crystal stack actuator with many intermittent piezoelectric and nonpiezoelectric layers may also play a role. Inertia type piezo motors are compact, low cost motors with relatively low force. A special epoxy sealing guarantees the most flexible, longest lifetime protection available on the market.
Model and design of a power driver for piezoelectric stack. Electrical and force characteristics of piezoelectric stacked. Sr series 150v piezo ring stack actuators the piezodrive sr ring stacks are high performance multilayer actuators with a vacuum compatible polymer coating and a large central aperture. The piezoelectric effect is understood as the linear electromechanical interaction between the mechanical and the electrical state in certain crystalline. They are internally preloaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic nanopositioning applications. Uhvcompatible to 109 hpa, no outgassing, high bakeout temperature. Piezo stack a low voltage piezoelectric stack is a monolithic ceramic construction of many thin piezoceramic layers which are connected in parallel electrically. Subnanometer runout introduction advantages of piezoelectric positioning systems applications for piezo actuators glossary units and. Multilayer piezoelectric stack actuator characterization.